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Example: silica particles

Commercial silica particles are widely available on the market. The figures show EOS CLOUDS of a mix of 0.3 µm and 2.0 µm monodisperse silica spheres. Two separate ‘clouds’ appear and can be analysed independently. The measured numerical concentrations are 1.4×10^6 particles/ml for the 0.3 µm sample and 1.3×10^5 particles/ml for the 2 µm sample.

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Example: CeO2 slurry

Cerium oxide (CeO2), also known as ceria, is widely used as an abrasive for chemical-mechanical polishing (CMP) of silicon surfaces. A few microlitres of a CeO2 slurry are dispersed in water. The SPES data are shown in the figure. The EOS software determines a refractive index of 2.0 ± 0.4, which agrees with the expected value.

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Example: diamond paste

Diamond, both natural and synthetic, is used in high-performance cutters, chainsaws, drills, and polishing and lapping machines. Their main advantage over other abrasives is their superior (cutting) performance and durability. The EOS software determines a refractive index of 2.4 ± 0.4, which corresponds to the expected value.

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Particle characterisation of abrasives l Inventech

CLASSIZER™ ONE is an ideal tool for characterising abrasives.